[IEEE International Semiconductor Device Research Symposium, 2003 - Washington, DC, USA (Dec. 10-12, 2003)] International Semiconductor Device Research Symposium, 2003 - Electrical characterization of dielectrics (oxide, nitride, oxy-nitride) for use in MIM capacitors for mixed signal applications

✍ Scribed by Prasad, J.; Anser, M.; Thomason, M.

• Book ID: 118194977
• Publisher: IEEE
• Year: 2003
• Weight: 98 KB
• Volume: 0
• Category: Article
• ISBN-13: 9780780381391
• DOI: 10.1109/isdrs.2003.1272117