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The sputtering of SiO2 and its dependence on oxygen partial pressure

✍ Scribed by Harald Jacobsson; G. Holmen

Book ID: 113284582
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 851 KB
Volume: 82
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(93)96031-7

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