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The size effect of liftoff metallization of sputtered aluminum films

✍ Scribed by Serikawa, T.; Sakurai, T.

Book ID: 114594094
Publisher: IEEE
Year: 1982
Tongue: English
Weight: 673 KB
Volume: 29
Category: Article
ISSN: 0018-9383
DOI: 10.1109/t-ed.1982.20786

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