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The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor

✍ Scribed by M. Tanaka; M. Shimojo; K. Mitsuishi; K. Furuya


Publisher
Springer
Year
2004
Tongue
English
Weight
435 KB
Volume
78
Category
Article
ISSN
1432-0630

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