✦ LIBER ✦
The photolytic laser chemical vapor deposition rate of platinum, its dependence on wavelength, precursor vapor pressure, light intensity, and laser beam diameter
✍ Scribed by D. Braichotte; C. Garrido; H. van den Bergh
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 899 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0169-4332
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