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The roles of hydrogen in deposition of diamond film using hydrogen-oxyacetylene combustion flame

✍ Scribed by G. Zhimeng; Y. Sheng; L. Heyi

Publisher
Springer
Year
1995
Tongue
English
Weight
620 KB
Volume
14
Category
Article
ISSN
0261-8028

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✍ Tang, C. J. ;Gu, L. P. ;GrΓ‘cio, J. ;Ribeiro, J. L. πŸ“‚ Article πŸ“… 2009 πŸ› John Wiley and Sons 🌐 English βš– 351 KB

## Abstract In this work, we study the influence of oxygen additive in the gas phase on hydrogen impurity incorporation into thick nanocrystalline diamond (NCD) films. Various diamond samples were grown on large silicon wafers of 5.08 cm diameter by adjusting the amount of oxygen and nitrogen addit