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Study of hydrogen in diamond-like carbon films using nuclear reaction analysis

✍ Scribed by Zheng Zhihao; Wang Yongqiang; Liao Changgang; Fu Hongbin

Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
322 KB
Volume
40
Category
Article
ISSN
0042-207X

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Diamond-like Carbon (DLC) coatings have recently proven to be suitable for a number of tribological applications. Hardness of the DCL coating is very important for such application. An in-situ, non-destructive technique to measure the film hardness would be crucial for process control and quality co