✦ LIBER ✦
Study of hydrogen incorporation in MOS-structures after various process steps using nuclear reaction analysis (NRA)
✍ Scribed by J. Krauser; F. Wulf; M.A. Briere; J. Steiger; D. Bräunig
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 318 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0167-9317
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