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The role of microstructure in luminescent properties of Er-doped nanocrystalline Si thin films

โœ Scribed by M. V. Stepikhova; M. F. Cerqueira; M. Losurdo; M. M. Giangregorio; E. Alves; T. Monteiro; M. J. Soares


Book ID
110137611
Publisher
SP MAIK Nauka/Interperiodica
Year
2004
Tongue
English
Weight
223 KB
Volume
46
Category
Article
ISSN
1063-7834

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Erbium and silicon co-doped silica films have been fabricated by reactive magnetron sputtering. A correlation is made between the microstructure monitored by the hydrogen rate r H in the plasma and the photoluminescence properties. The erbium emission at 1.54 m is enhanced by the increase of r H whi