✦ LIBER ✦

The recrystalization of BF2+-implanted silicon by light-flash annealing

✍ Scribed by Juh-Tzeng Leu; Lih-Juann Chen; Lea-Rong Lu

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Electrical activation of ultra-shallow B

✍ Woo Sik Yoo; Kitaek Kang 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 413 KB

Dose Dependence of the Flash Lamp Anneal

✍ Panknin, D. ;Wieser, E. ;Klabes, R. ;Syhre, H. 📂 Article 📅 1983 🏛 John Wiley and Sons 🌐 English ⚖ 479 KB

Electrical activation and damage anneali

✍ Wieser, E. ;Panknin, D. 📂 Article 📅 1984 🏛 John Wiley and Sons 🌐 English ⚖ 416 KB

Reverse annealing behaviour and shallow

✍ Liu Jialu; Zhang Tingqing; Yang Xiaoyue 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 204 KB

Electrical activation and impurity redis

📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 119 KB

On the role of fluorine in BF2+ implante

✍ G.S. Virdi; C.M.S. Rauthan; B.C. Pathak; W.S. Khokle; S.K. Gupta; Krishan Lal 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 429 KB