The preparation of thin self supporting boron films
โ Scribed by A.H.F. Muggleton; F.A. Howe
- Publisher
- Elsevier Science
- Year
- 1961
- Weight
- 340 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0029-554X
No coin nor oath required. For personal study only.
๐ SIMILAR VOLUMES
Boron thin films were prepared by plasma assisted chemical vapor deposition. The source gas was boron trichloride (BCl 3 ). Ring patterns of transmission electron beam diffraction indicated that films were polycrystalline -rhombohedral boron. Optical absorption edge was estimated from absorption spe
Boron thin 5lms were deposited by electron beam evaporation and by pyrolysis of decaborane on quartz substrates. Re6ection electron beam di4raction was used to characterize the crystal structure. The amorphous structure was observed for the 5lm deposited by electron beam evaporation. The 5lm was pol