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The preparation of thin layers of Ge and Si by chemical hydrogen plasma transport

✍ Scribed by S. Vepřek; V. Mareček

Publisher
Elsevier Science
Year
1968
Tongue
English
Weight
165 KB
Volume
11
Category
Article
ISSN
0038-1101

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Preparation of hydrogenated amorphous si
Preparation of hydrogenated amorphous silicon carbide thin films by plasma enhanced chemical vapour deposition
✍ J Huran; J Šafránková; A.P. Kobzev 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 252 KB

Thin silicon carbide (SiCI films were prepared by plasma enhanced chemical vapour deposition PECVDI. The structural properties of Sic films were investigated by IR, RBS, and ERD measurement techniques. The results showed that the films contain the typical features found in hydrogenated amorphous Sic