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The preparation of substrates for film deposition using glow discharge techniques

Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
157 KB
Volume
30
Category
Article
ISSN
0042-207X

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Due to the attractive properties, diamond-like amorphous carbon (DLC) films have been developed as resist material for photo lithography and as hard coatings. For these applications flat surfaces are required. In this work, the surface morphology and the deposition mechanism of DLC films have been i