In-Situ Mass Spectrometry Analyses of th
โ
V. Rouessac; S. Roualdes; J. Durand
๐
Article
๐
2002
๐
John Wiley and Sons
๐
English
โ 339 KB
๐ 1 views
Mass Spectrometry (MS) analyses, up to 300 amu, were performed on linear hexamethyldisiloxane (HMDSO) and cyclic octamethylcyclotetrasiloxane (OMCTSO) vapors in low frequency plasmas (40 kHz). The fragmentation rates of the precursors, and possible oligomerization in the gas phase, depend on the pla