Cross Linking Behavior of Preceramic Pol
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M. Schulz; M. BΓΆrner; J. GΓΆttert; T. Hanemann; J. HauΓelt; G. Motz
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Article
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2004
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John Wiley and Sons
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English
β 258 KB
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Ceramic properties are important for applications in micro system technologies. Various lithographic methods are being widely used for the direct fabrication of very precise plastic or metal micro structured surfaces. High temperature stable ceramics can be achieved from preceramic polymers using re