✦ LIBER ✦
Cross Linking Behavior of Preceramic Polymers Effected by UV- and Synchrotron Radiation
✍ Scribed by M. Schulz; M. Börner; J. Göttert; T. Hanemann; J. Haußelt; G. Motz
- Publisher
- John Wiley and Sons
- Year
- 2004
- Tongue
- English
- Weight
- 258 KB
- Volume
- 6
- Category
- Article
- ISSN
- 1438-1656
No coin nor oath required. For personal study only.
✦ Synopsis
Ceramic properties are important for applications in micro system technologies. Various lithographic methods are being widely used for the direct fabrication of very precise plastic or metal micro structured surfaces. High temperature stable ceramics can be achieved from preceramic polymers using relatively low pyrolysis temperatures. A direct lithographic process to produce ceramic microstructures has been developed.