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The Nucleation and Growth of Nanocrystalline Diamond Films in Millimeter-Wave CVD Reactor

✍ Scribed by Chernov, V. V.; Vikharev, A. L.; Gorbachev, A. M.; Kozlov, A. V.; Vul', A. Ya.; Aleksenskii, A. E.

Book ID: 119991941
Publisher: Taylor and Francis Group
Year: 2012
Tongue: English
Weight: 383 KB
Volume: 20
Category: Article
ISSN: 1536-383X
DOI: 10.1080/1536383X.2012.656550

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## Abstract Nanocrystalline diamond/amorphous carbon (NCD/a‐C) composite films have been deposited by microwave chemical vapour deposition from methane‐rich CH~4~/N~2~ mixtures and characterized carefully by a variety of methods with respect to morphology and structure, composition, crystallinity,