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On the reduction of the non-diamond phase in nanocrystalline CVD diamond films

✍ Scribed by Remes, Z.; Kromka, A.; Vanecek, M.; Ghodbane, S.; Steinmüller-Nethl, D.

Book ID: 123475704
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 547 KB
Volume: 18
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2009.02.007

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## Abstract The photosensitive, nominally undoped nanocrystalline diamond (NCD) films were grown on insulating substrates at a relatively low temperature below 600 °C. The NCD films were exposed to the hydrogen plasma and then briefly to the oxide plasma. This treatment significantly reduced the su