The microstructure and optical properties of crystallized hydrogenated silicon films prepared by very high frequency glow discharge

✍ Scribed by Desheng Wang; Zhibo Yang; Fei Li; Deyan He

• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 886 KB
• Volume: 257
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2011.03.136