✦ LIBER ✦
1851. Preparation and properties of thin films silicon-nitrogen compounds produced by a radio frequency glow discharge reaction: R C G Swan et al, J Electron Soc, 114 (7), July 1967, 714–717
- Publisher
- Elsevier Science
- Year
- 1967
- Tongue
- English
- Weight
- 338 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0042-207X
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