✦ LIBER ✦

The mechanism of plasma-induced deposition of amorphous silicon from silane

✍ Scribed by S. Vepřek; M. Heintze

Publisher: Springer
Year: 1990
Tongue: English
Weight: 968 KB
Volume: 10
Category: Article
ISSN: 0272-4324
DOI: 10.1007/bf01460445

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Controversies in the suggested mechanism

Controversies in the suggested mechanisms of plasma-induced deposition of silicon from silane

✍ Stan Veprˇek 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 145 KB

Deposition of amorphous silicon films fr

Deposition of amorphous silicon films from an electrostatically confined silane plasma

✍ J Andreu; G Sardin; JC Delgado; A Canillas; J Esteve; JL Morenza 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 168 KB

The presence of silane gas in plasma-dep

The presence of silane gas in plasma-deposited hydrogenated amorphous silicon

✍ T. Bekkay; R. Izquierdo; M. St-Denis; E. Sacher; A. Yelon 📂 Article 📅 1989 🏛 Elsevier Science ⚖ 289 KB

The mechanism of two-photon photochemica

The mechanism of two-photon photochemical laser-induced deposition of silicon thin films from silane

✍ Shoshana Tamir; Shammai Speiser 📂 Article 📅 1996 🏛 Springer ⚖ 902 KB

We have investigated the mechanism of silicon thin film deposition by ArF excimer laser irradiation of silane gas diluted with argon. The Si films were deposited by a focused laser beam irradiating in parallel to silicon and silicon dioxide substrates at a gas flow rate of 20 SCCM, total pressure of

Analysis of amorphous-silicon deposition

Analysis of amorphous-silicon deposition conditions in plasma-silane mixtures at low pressure

✍ S. V. Petrov; E. P. Prokopiev; E. M. Sokolov 📂 Article 📅 1997 🏛 Italian Physical Society 🌐 English ⚖ 484 KB

Open questions regarding the mechanism o

Open questions regarding the mechanism of plasma-induced deposition of silicon

✍ Stan Vepřek; Maritza G. J. Vepřek-Heijman 📂 Article 📅 1991 🏛 Springer 🌐 English ⚖ 504 KB