✦ LIBER ✦

The presence of silane gas in plasma-deposited hydrogenated amorphous silicon

✍ Scribed by T. Bekkay; R. Izquierdo; M. St-Denis; E. Sacher; A. Yelon

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Oxidation of plasma-deposited hydrogenat

✍ B Drevillon; F Vaillant 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 284 KB

The plasma-enhanced deposition of hydrog

✍ B.C. Easton; J.A. Chapman; O.F. Hill; M.J. Powell 📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 616 KB

Deposition of amorphous silicon films fr

✍ J Andreu; G Sardin; JC Delgado; A Canillas; J Esteve; JL Morenza 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 168 KB

Hydrogen content and density of plasma-d

📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 161 KB

Plasma spectroscopy—Glow discharge depos

✍ Akihisa Matsuda; Kazunobu Tanaka 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 943 KB

Improvements in the disilane plasma depo

✍ P.E. Vanier; F.-C. Su 📂 Article 📅 1987 🏛 Elsevier Science ⚖ 477 KB