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The mechanical properties and resistivity of Au/NiCr/Ta multi-layered films on Si-(111) substrate

✍ Scribed by Wu Tang; Kewei Xu; Jian Lu

Book ID
113936899
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
573 KB
Volume
520
Category
Article
ISSN
0040-6090

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πŸ“œ SIMILAR VOLUMES

Surface roughness and resistivity of Au
Surface roughness and resistivity of Au film on Si-(111) substrate
✍ Wu Tang; Kewei Xu; Ping Wang; Xian Li πŸ“‚ Article πŸ“… 2003 πŸ› Elsevier Science 🌐 English βš– 188 KB

Au films were deposited on Si-(111) substrate by magnetron sputtering technique. The structure of the films was characterized by X-ray diffraction (XRD). The resistivity and the surface roughness were measured by four-point probe and atomic force microscopy (AFM). The results showed that Au-( ) was