The effect of plating on magnetron sputtering: Residual stress and scratch behavior of Au/NiCr/Ta multi-layers

✍ Scribed by Wu Tang; Xiaolong Weng; Longjiang Deng; Kewei Xu

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 331 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2006.04.019