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The low temperature synthesis of Al doped ZnO films on glass and polymer using pulsed co-magnetron sputtering: H2 effect

โœ Scribed by Yun M. Chung; Chang S. Moon; Woo S. Jung; Jeon G. Han


Book ID
108289279
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
226 KB
Volume
515
Category
Article
ISSN
0040-6090

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The change of stoichiometric ratio caused by the increase in sputtering power in Al-doped ZnO (AZO) films was investigated, where the films were grown by pulsed dc magnetron sputtering with a cylindrical target. The properties of the films were strongly affected by the sputtering power. Lower sputte