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The kinetics of the low-pressure chemical vapour deposition of molybdenum on silicon from molybdenum hexafluoride and hydrogen

✍ Scribed by M.H.J.M. de Croon; E.N. Orij; G.B. Marin

Book ID: 108311598
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 312 KB
Volume: 54
Category: Article
ISSN: 0009-2509
DOI: 10.1016/s0009-2509(98)00512-0

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