✦ LIBER ✦

The kinetics of silicon dioxide chemical vapour deposition I: Surface chemical reactions

✍ Scribed by Piotr B. Grabiec; Jan Przyłuski

Publisher: Elsevier Science
Year: 1985
Weight: 350 KB
Volume: 25
Category: Article
ISSN: 0376-4583
DOI: 10.1016/0376-4583(85)90082-2

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The kinetics of silicon dioxide chemical

The kinetics of silicon dioxide chemical vapour deposition II: The model of the process

✍ Piotr B. Grabiec; Jan Przyłuski 📂 Article 📅 1985 🏛 Elsevier Science ⚖ 391 KB

The kinetics of silicon dioxide chemical

The kinetics of silicon dioxide chemical vapour deposition III: Experimental verification of the model

✍ Piotr B. Grabiec; Jan PryyŁuski 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 771 KB

Equilibrium and kinetics in the chemical

Equilibrium and kinetics in the chemical vapour deposition of silicon

✍ J. Bloem 📂 Article 📅 1975 🏛 Elsevier Science 🌐 English ⚖ 605 KB

Growth kinetics and reaction mechanism o

Growth kinetics and reaction mechanism of silicon chemical vapour deposition from silane

✍ Meng Tao 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 931 KB

On chemical kinetics of silicon depositi

On chemical kinetics of silicon deposition from silane (I). The first order chemical reaction

✍ Dr. H. Kühne 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 497 KB 👁 1 views

Chemistry and kinetics of chemical vapou

Chemistry and kinetics of chemical vapour deposition of pyrocarbon: I. Fundamentals of kinetics and chemical reaction engineering

✍ W. Benzinger; A. Becker; K.J. Hüttinger 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 949 KB

Open scientific problems of chemical vapour deposition of pyrocarbon are discussed on the basis of brief historical and literature reviews. Some thermodynamic considerations are followed by detailed analyses of reaction pathways in hydrocarbon pyrolysis. Reaction schemes are derived, and correspondi