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The ion charge state fluctuation effect during high energy ion implantation: Monte Carlo simulation

✍ Scribed by A.F. Burenkov; F.F. Komarov; S.A. Fedotov


Book ID
113283089
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
273 KB
Volume
67
Category
Article
ISSN
0168-583X

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