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The investigation on the microstructure of magnetron sputtering ion plated Al/Cu film: The effect of substrate negative bias voltage

โœ Scribed by B.Q. Chen; F.J. Wang; Y.K. Wang; J.X. Wang; H.M. Han; C.N. Wang; T.Y. Niu; H.W. Gao


Book ID
117210978
Publisher
Elsevier Science
Year
1988
Weight
726 KB
Volume
22
Category
Article
ISSN
0036-9748

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