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The investigation of the contrast of X-ray masks repaired by laser-induced CVD

✍ Scribed by E.F Reznikova; V.V Chesnokov; G.I Zharkova; I.K Igumenov; O.A Makarov; V.P Naz'mov

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 426 KB
Volume: 359
Category: Article
ISSN: 0168-9002
DOI: 10.1016/0168-9002(94)01386-1

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