Optimization of the laser-induced deposition technique for its application in X-ray mask repair

✍ Scribed by R. Putzar; H.-C. Petzold; H. Staiger

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 532 KB
• Volume: 46
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(90)90131-i