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The interface reaction of high-k La2Hf2O7/Si thin film grown by pulsed laser deposition

✍ Scribed by Xuerui Cheng; Zeming Qi; Guobin Zhang; Yonghu Chen; Tingting Li; Guoqiang Pan; Min Yin

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 282 KB
Volume: 256
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2009.08.070

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