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The Interaction of the Supersonic Plasma-Jet with the Substrate in the RF Plasma-Chemical Reactor

✍ Scribed by M. Šícha; Z. Hubička; M. Tichý; M. Novák; L. Soukup; L. Jastrabík; J. F. Behnke; V. Kapička; K. Kapoun; M. Šerý

Publisher
John Wiley and Sons
Year
1996
Tongue
English
Weight
643 KB
Volume
36
Category
Article
ISSN
0005-8025

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