Decomposition of carbon dioxide in the RF plasma environment

✍ Scribed by Lien-Te Hsieh; Wen-Jhy Lee; Chun-Teh Li; Chuh-Yung Chen; Ya-Fen Wang; Moo-Been Chang

• Publisher: Wiley (John Wiley & Sons)
• Year: 1998
• Tongue: English
• Weight: 302 KB
• Volume: 73
• Category: Article
• ISSN: 0268-2575
• DOI: 10.1002/(sici)1097-4660(199812)73:4<432::aid-jctb972>3.0.co;2-0

✦ Synopsis

Application of radio-frequency (RF) plasma as an alternative technology for the decomposition of carbon dioxide with methane gas is demonstrated. The results of this study revealed that in plasma, the best CO 2 /CH 4 /Ar decomposition fraction of carbon dioxide was 60É0%, which occurs around 316¡C in the condition designed for 5% feeding concentration of 5% CO 2 , feeding concentration of 20 torr operation pressure, 100 sccm total gas CH 4 , Ñow rate and 90 watts input power wattage. The CH, and radicals CH 2 CH 3 obtained from the destruction of could result e †ectively in high decomposi-CH 4 tion of

in the plasma reactor. The optimal mathematical models based on CO 2 the experimental data obtained were also developed and tested by means of sensitivity analysis, which shows that the input power wattage (W) was the most sensitive parameter for the decomposition.