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The influence of vapor phase cleaning on the composition and the surface roughness of rapid thermal oxides and nitrided oxides

✍ Scribed by N. Sacher; B. Froeschle; F. Glowacki


Book ID
107457928
Publisher
Springer US
Year
1999
Tongue
English
Weight
174 KB
Volume
28
Category
Article
ISSN
0361-5235

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