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The influence of tip performance on scanning probe lithography

✍ Scribed by Hualan Zhou; Zhuang Li; Aiguo Wu; Jianping Zheng; Jian Zhang; Shifa Wu

Book ID: 108418208
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 314 KB
Volume: 221
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(03)00944-9

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