Nano-material processing with laser radi
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J. Jersch; F. Demming; J. Hildenhagen; K. Dickmann
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Article
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1998
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Elsevier Science
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English
โ 366 KB
We report preliminary results of using a scanning probe microscope/laser combination to perform nanostructuring on insulator and metal surfaces in air. This technique enables processing of structures with a lateral resolution of approximately 10 nm. In this paper we present our last structuring resu