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The influence of the source-to-substrate distance on oxygen sorption during aluminium film deposition in vacuum

✍ Scribed by J. Fridrich; K. Starosta

Publisher: Elsevier Science
Year: 1973
Tongue: English
Weight: 115 KB
Volume: 15
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(73)90050-3

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