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The influence of the ion implantation temperature and the dose rate on smart-cut© in GaAs

✍ Scribed by M. Webb; C. Jeynes; R. Gwilliam; P. Too; A. Kozanecki; J. Domagala; A. Royle; B. Sealy

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
266 KB
Volume
240
Category
Article
ISSN
0168-583X

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The temperature during ion implantation is well known to influence the microstructure of ionbombarded steels. In the course of our studies on metal-forming tools we could demonstrate the great importance of an additional moderate heat treatment subsequent to the ion implantation. Wear of heat-treate