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The influence of the ion implantation temperature and the flux on smart-cut© in GaAs

✍ Scribed by M. Webb; C. Jeynes; R.M. Gwilliam; Z. Tabatabaian; A. Royle; B.J. Sealy

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
164 KB
Volume
237
Category
Article
ISSN
0168-583X

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