Radio-frequency-powered glow discharge optical emission spectroscopy (GDOES) is an extremely powerful and reliable technique for depth proΓling analysis of thin, insulating barrier anodic Γlms formed on aluminium. It allows ready and rapid analysis of the Γlms, with depth resolution and sensitivity
β¦ LIBER β¦
The influence of surface topography on the depth resolution of the PIGE depth profiling technique
β Scribed by F. Plier; H.-E. Zschau; G. Otto
- Book ID
- 113283453
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 217 KB
- Volume
- 66
- Category
- Article
- ISSN
- 0168-583X
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The influence of Ar pressure on depth resolution during glow discharge optical emission spectroscopy (GDOES) depth profiling has been examined through the use of 358 nm thick anodic alumina films grown over flat aluminium surfaces. The films are ideal standards for the present purpose, being amorpho