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The influence of pressure on the operation of glow-discharge sputtering systems

โœ Scribed by I Abril; A Gras-Marti; JA Valles-Abarca


Book ID
111710765
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
405 KB
Volume
37
Category
Article
ISSN
0042-207X

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Influences of gas density depletion on h
โœ Go Imada; Wataru Masuda; Kiyoshi Yatsui ๐Ÿ“‚ Article ๐Ÿ“… 2000 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 193 KB

High-pressure, pulsed glow discharge has been studied for the excitation discharge in TEA gas lasers. Various instabilities occur in the subsequent discharge, which induce the arc and collapse for the highly repetitive operation. In this paper, the influences of the gas density depletion on the high