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Modelling of glow discharge sputtering systems: Theory of the cathode fall region

✍ Scribed by A. Gras-Marti; I. Abril; J.A. Valles-Abarca

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 318 KB
Volume: 124
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(85)90029-x

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