✦ LIBER ✦

The influence of N2 partial pressure and substrate bias on electron density and temperature in a dc sputtering diode

✍ Scribed by G Lempérière; JM Poitevin

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The influence of N2, partial pressure an

📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 151 KB

The effect of N2 partial pressure, depos

✍ W.D. Sproul; P.J. Rudnik; M.E. Graham 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 481 KB

Influence of the Argon Pressure at dc Ma

✍ G. Sobe; H. Schreiber; G. Weise; A. Heinrich 📂 Article 📅 1992 🏛 John Wiley and Sons 🌐 English ⚖ 782 KB

517. Influence of substrate temperature

📂 Article 📅 1974 🏛 Elsevier Science 🌐 English ⚖ 182 KB