The influence of N2, partial pressure and substrate bias on electron density and temperature in a dc sputtering diode: G Lempérière and J M Poitevin, Vacuum, 37, 1987, 825–830

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 151 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90280-7