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The influence of growth temperature and oxygen on the phase compositions of CuAlO2 thin films prepared by pulsed laser deposition

โœ Scribed by Zanhong Deng; Xiaodong Fang; Ruhua Tao; Weiwei Dong; Da Li; Xuebin Zhu

Book ID
116603186
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
539 KB
Volume
466
Category
Article
ISSN
0925-8388

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Phase development and crystallization of
Phase development and crystallization of CuAlO2 thin films prepared by pulsed laser deposition
โœ Jong-Chul Lee; Se-Young Um; Young-Woo Heo; Joon-Hyung Lee; Jeong-Joo Kim ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 906 KB

A polycrystalline CuAlO 2 single-phase target was fabricated by the conventional solid-state reaction route using Cu 2 O and Al 2 O 3 . Thin films of CuAlO 2 were deposited by a pulsed laser deposition process on sapphire substrates at different temperatures. Then, post-annealing was followed at dif