𝔖 Bobbio Scriptorium
✦   LIBER   ✦

The influence of grating characteristics on moiré fringe multiplication

✍ Scribed by S. M. Graham; R. J. Sanford

Book ID
112732392
Publisher
Sage Publications
Year
1988
Tongue
English
Weight
913 KB
Volume
28
Category
Article
ISSN
0014-4851

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Influences of the inclination of grating
Influences of the inclination of gratings on the alignment accuracies in moiré alignment systems
✍ Hideo Furuhashi; Lizhong Zhou; Jingnan Liu; Akihito Matsuo; Yoshiyuki Uchida 📂 Article 📅 2002 🏛 John Wiley and Sons 🌐 English ⚖ 201 KB

## Abstract In the lithographic processes of VLSIs, high setting accuracies between masks and wafer are required. The methods using moiré signals obtained by gratings were found to give very high alignment accuracies. In this paper, influences of the inclination of gratings for the alignment accura