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The application of Moiré fringes to check the quality of surface relief gratings by using SEM

✍ Scribed by Salminen, O. ;Keinonen, T. ;Lindström, R. ;Silfsten, P.

Publisher
John Wiley and Sons
Year
1987
Tongue
English
Weight
189 KB
Volume
100
Category
Article
ISSN
0031-8965

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