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The influence of elevated temperature on degradation and lifetime prediction of thin silicon-dioxide films

✍ Scribed by Kaczer, B.; Degraeve, R.; Pangon, N.; Groeseneken, G.

Book ID
114538227
Publisher
IEEE
Year
2000
Tongue
English
Weight
200 KB
Volume
47
Category
Article
ISSN
0018-9383

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## Abstract ZnO: Al films were prepared using low cost spray pyrolysis technique. The dependence of the physical properties on the substrate temperature was studied. The best films obtained at 500Β°C substrate temperature with preferred [002] orientation. The sheet resistance decreases with increase