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The influence of deposition temperature on growth mode, optical and mechanical properties of ZnO films prepared by the ALD method

✍ Scribed by Yuan, N.Y.; Wang, S.Y.; Tan, C.B.; Wang, X.Q.; Chen, G.G.; Ding, J.N.

Book ID: 122621798
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 521 KB
Volume: 366
Category: Article
ISSN: 0022-0248
DOI: 10.1016/j.jcrysgro.2012.12.024

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