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The influence of deposition temperature on growth mode, optical and mechanical properties of ZnO films prepared by the ALD method

โœ Scribed by Yuan, N.Y.; Wang, S.Y.; Tan, C.B.; Wang, X.Q.; Chen, G.G.; Ding, J.N.


Book ID
122621798
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
521 KB
Volume
366
Category
Article
ISSN
0022-0248

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## Abstract Zinc oxide thin films have been prepared via a solโ€“gel process. The influence of annealing temperature on the structural and optical properties of the ZnO thin films has been investigated. The prepared ZnO thin films had a polycrystalline hexagonal wurtzite structure with no preferred o